Amorphous gallium oxide grown by low-temperature PECVD
by
Eiji Kobayashi, Mathieu Boccard, Quentin Jeangros, Nathan Rodkey, Daniel Vresilovic, Aicha Hessler-Wyser, Max Döbeli, Daniel Franta, Stefaan De Wolf, Monica Morales-Masis, Christophe Ballif
Year:
2018
DOI:
https://doi.org/10.1116/1.5018800
Bibliography
Kobayashi, Eiji, Mathieu Boccard, Quentin Jeangros, Nathan Rodkey, Daniel Vresilovic, Aïcha Hessler-Wyser, Max Döbeli et al. "Amorphous gallium oxide grown by low-temperature PECVD." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 36, no. 2 (2018): 021518.